Fast, Non-Contact, Wafer-Scale, Atomic Layer Resolved Imaging of 2D Materials by Ellipsometric Contrast Micrography

Fast, Non-Contact, Wafer-Scale, Atomic Layer Resolved Imaging of 2D Materials by Ellipsometric Contrast Micrography
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通过椭偏对比显微成像对 2D 材料进行快速、非接触式、晶圆级、原子层分辨成像

DOI:
10.17863/cam.27272
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发表时间:
2018
期刊:
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通讯作者:
Braeuninger-Weimer P
Braeuninger-Weimer P
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文献类型:
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作者:
Braeuninger-Weimer P

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