Capacitive sensor system for measurement of temperature and humidity
Capacitive sensor system for measurement of temperature and humidity
复制标题
用于测量温度和湿度的电容式传感器系统
DOI:
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发表时间:
1994
期刊:
影响因子:
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通讯作者:
U. Banach
中科院分区:
文献类型:
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作者:
B. Oertel;T. Hübert;D. Heinze;U. Banach
Dielectrical glass-ceramic materials for capacitive sensors to measure temperature and humidity have been developed. These sensors are suited for temperature measurement between 4.2 and 100 K (low temperature range), but also for temperatures up to 573 K. The measurement of gas humidity is possible between 5 and 95% R.H. The sensors can be used in multicomponent sensor systems under industrial conditions.