Modified photo-sensors for grating-image type micro-encoder
Modified photo-sensors for grating-image type micro-encoder
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DOI：
10.1007/s00542-005-0503-y
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发表时间：
2005-08
期刊：
影响因子：
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通讯作者：
Y. Kanamori;R. Kamata;M. Mitamura;Y. Ito;K. Hane
中科院分区：
文献类型：
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作者：
Y. Kanamori;R. Kamata;M. Mitamura;Y. Ito;K. Hane
提出了一种新型光栅成像式编码器集成技术，并采用硅微机械加工技术制作了光栅成像式编码器传感器。传感器由硅栅和线光电二极管组成。通过硅栅极的光发射和四相移线光电二极管的光检测使光学系统紧凑。此外，另一个M系列排列的光电二极管阵列安装在同一基板上用于零点检测。
New integration technique for grating-imaging-type encoder is proposed and the sensor for the encoder has been fabricated using Si micromachining technology. The sensor consists of the Si grids and line photodiodes. The light emission through the Si grids and the light detection with the four-phase-shifted line photodiodes make the optical system compact. Moreover, another photodiode array of the M-series arrangement is installed on the same substrate for the zero-point detection.