Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero-Stiffness Mechanism
Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero-Stiffness Mechanism
复制标题
采用准零刚度机构的微机械惯性传感器测量潮汐倾斜
DOI：
10.1109/jmems.2020.3001928
复制
发表时间：
2020-10-01
影响因子：
2.7
通讯作者：
Tu, Liangcheng
中科院分区：
文献类型：
--
作者：
Wu, Wenjie;Liu, Dandan;Tu, Liangcheng
基于弹簧-质量结构的高精度微机电惯性传感器在惯性导航、灾害预警和资源勘探等领域有着广泛的应用前景。降低谐振频率是进一步提高传感器灵敏度的关键。然而，传统的加工方法从尺寸缩小到加工精度都面临着难以克服的困难。本文提出了一种与MEMS技术兼容的准零刚度机构，并提出了一种精确调节刚度的微加工方法。通过改善典型弹簧的柔度，采用轴向力诱导的负刚度补偿机制，将微弹簧-质量结构的谐振频率降低到0.7 Hz，比目前最先进的微结构低至少3倍。基于这种基于准零刚度机构的超灵敏微结构，芯片尺寸为邮票大小的微惯性传感器在0.04 Hz时显示出0.6 nrad/ $ $ surd $ Hz的低自噪声和可与传统摆式惯性传感器媲美的高长期稳定性。据我们所知，这是第一个能够成功测量潮汐倾斜信号的微型装置。(2020 - 0048)
High-precision microelectromechanical inertial sensors based on spring-mass structures are of great interests for a wide range of applications, including inertial navigation, disaster warning and resource exploration. Lowering the resonant frequency is essential to further improve the sensitivity of the sensors. However, conventional approaches are facing insurmountable difficulties from size reduction to machining precision. This paper proposed a novel quasi-zero-stiffness mechanism that is compatible with MEMS technologies together with a micromaching approach for adjusting the stiffness precisely. By improving the compliance of a typical spring with a negative-stiffness compensation mechanism induced by axial force, the resonant frequency of the micro spring-mass structure is lowered to 0.7 Hz, which is at least 3 times lower than current state-of-the-art micro structures. Based on this ultra-sensitive micro structure base on the quasi-zero-stiffness mechanism, the micro inertial sensor, with a chip size of a postage stamp, has shown a low self-noise of 0.6 nrad/ $\surd $ Hz at 0.04 Hz and a high long-term stability that are comparable to traditional pendulum inertial sensors. It is the first micro device, to our knowledge, that can successfully measure the tidal tilt signal. [2020-0048]