General theory of acceptor-oxygen-vacancy complex single donor in high-dielectric-constant metallic oxide insulators

General theory of acceptor-oxygen-vacancy complex single donor in high-dielectric-constant metallic oxide insulators
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DOI:
10.1063/1.1897051
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发表时间:
2005-04
影响因子:
4
通讯作者:
W. Lau;Taejoon Han
W. Lau;Taejoon Han
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
W. Lau;Taejoon Han

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在此之前,我们通过实验证明了氧化钽薄膜中Si / o空位配合物单给体和C / o空位配合物单给体的电离能小于o空位双给体的第一电离能[W]。刘士生,梁丽丽,韩涛,和n.p.桑德勒,苹果。理论物理。《社会科学》,2003年第8期。在这封信中,提出了一个基于受体o空位复合物单给体比o空位双给体更大的电子轨道的理论,以解释我们之前报道的实验观察背后的物理原理,以及为什么Si或C可能导致氧化钽薄膜中泄漏电流的增加。
Previously, we showed experimentally that Si∕O-vacancy complex single donors and C∕O-vacancy complex single donors in tantalum oxide films have smaller ionization energies than the first ionization energy of O-vacancy double donors [W. S. Lau, L. L. Leong, T. Han, and N. P. Sandler, Appl. Phys. Lett. 83, 2835 (2003)]. In this letter, a theory based on a larger electron orbit for acceptor O-vacancy complex single donors compared to the O-vacancy double donors is proposed to explain the physics behind our previously reported experimental observation and why Si or C may cause an increase in leakage current in tantalum oxide films.