General theory of acceptor-oxygen-vacancy complex single donor in high-dielectric-constant metallic oxide insulators
General theory of acceptor-oxygen-vacancy complex single donor in high-dielectric-constant metallic oxide insulators
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DOI:
10.1063/1.1897051
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发表时间:
2005-04
影响因子:
4
通讯作者:
W. Lau;Taejoon Han
中科院分区:
文献类型:
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作者:
W. Lau;Taejoon Han
Previously, we showed experimentally that Si∕O-vacancy complex single donors and C∕O-vacancy complex single donors in tantalum oxide films have smaller ionization energies than the first ionization energy of O-vacancy double donors [W. S. Lau, L. L. Leong, T. Han, and N. P. Sandler, Appl. Phys. Lett. 83, 2835 (2003)]. In this letter, a theory based on a larger electron orbit for acceptor O-vacancy complex single donors compared to the O-vacancy double donors is proposed to explain the physics behind our previously reported experimental observation and why Si or C may cause an increase in leakage current in tantalum oxide films.