Measurement of thermal boundary conductance of a series of metal-dielectric interfaces by the transient thermoreflectance technique
Measurement of thermal boundary conductance of a series of metal-dielectric interfaces by the transient thermoreflectance technique
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DOI：
10.1115/1.1857944
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发表时间：
2005-03-01
影响因子：
--
通讯作者：
Norris, PM
中科院分区：
文献类型：
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作者：
Stevens, RJ;Smith, AN;Norris, PM
提出了一种非破坏性光学技术——瞬态热反射法（TTR）来测量热边界电导（TBC）的方法。提出了一种简单的TTR热模型，并讨论了其适用性和灵敏度。在四种不同的衬底（Si，蓝宝石，GaN和AlN）上制备了Cr， Al， Au和Pt样品系列，并在室温下测试了TTR信号，并将其拟合到热模型中。得到的TBC值变化超过3倍(0.71 × 10(8)-2.3 × 10（8) W/m(2) K）。结果表明，扩散失配模型（DMM）倾向于高估声子谱相似材料界面的TBC，而低估声子谱不同材料界面的TBC。DMM只考虑漫射弹性散射。讨论了其他散射机制，这可能解释了DMM在室温下的失效。
Measurement of the thermal boundary conductance (TBC) by use of a nondestructive optical technique, transient thermoreflectance (TTR), is presented. A simple thermal model for the TTR is presented with a discussion of its applicability and sensitivity. A specially prepared sample series of Cr, Al, Au, and Pt on four different substrates (Si, sapphire, GaN, and AlN) were tested at room temperature and the TTR signal fitted to the thermal model. The resulting TBC values vary by more than a factor of 3 (0.71 x 10(8)-2.3 x 10(8) W/m(2) K). It is shown that the diffuse mismatch model (DMM) tended to overpredict the TBC of interfaces with materials having similar phonon spectra, while underpredicting the TBC for interfaces with dissimilar phonon spectra. The DMM only accounts for diffuse elastic scattering. Other scattering mechanisms are discussed which may explain the failure of the DMM at room temperature.