Development of a nanoprofiler using the follow-up normal vector to the surface for next-generation ultraprecise mirrors
Development of a nanoprofiler using the follow-up normal vector to the surface for next-generation ultraprecise mirrors
复制标题
使用下一代超精密反射镜表面的后续法向矢量开发纳米轮廓仪
DOI:
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发表时间:
2012
期刊:
影响因子:
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通讯作者:
Koji Usuki
中科院分区:
文献类型:
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作者:
Zhan Jin;Atsushi Wada;Junghun Shin;Noboru Yugami;and Ryosuke Kodama;V.K.Verma;Franco Nori;鮫島弘光;Koji Usuki