A PIEZORESISTIVE GAAS PRESSURE SENSOR WITH GAAS/ALGAAS MEMBRANE TECHNOLOGY
A PIEZORESISTIVE GAAS PRESSURE SENSOR WITH GAAS/ALGAAS MEMBRANE TECHNOLOGY
复制标题
DOI：
10.1088/0960-1317/5/2/021
复制
发表时间：
1995-06-01
影响因子：
2.3
通讯作者：
HARTNAGEL, HL
中科院分区：
文献类型：
--
作者：
DEHE, A;FRICKE, K;HARTNAGEL, HL
本文报道了压阻式压力传感器的技术和性能，该传感器利用GaAs/AlGaAs膜将压力转换成应力，以引起p掺杂GaAs电阻器的电阻变化。我们已经测试了传感器的压差高达8 × 10（4）Pa，温度范围为室温至433 K。
This paper reports on the technology and performance of piezoresistive pressure sensors that utilize GaAs/AlGaAs membranes for pressure transduction into stress to induce resistance changes of p doped GaAs resistors. We have tested the sensor to differential pressure up to 8 x 10(4) Pa and in a temperature range of room temperature up to 433 K.