Wear of the AFM diamond tip sliding against silicon
Wear of the AFM diamond tip sliding against silicon
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DOI：
10.1016/s0043-1648(96)07447-9
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发表时间：
1997-03-01
期刊：
影响因子：
5
通讯作者：
Koide, H
中科院分区：
文献类型：
--
作者：
Khurshudov, AG;Kato, K;Koide, H
初始半径为 65 nm 的 AFM 金刚石尖端在单晶硅上滑动的磨损情况，既可通过硅的磨损率随着循环次数的增加而降低，也可通过使用标称半径约为 10-20 nm 的微加工 Si3N4 AFM 尖端对金刚石尖端形状进行直接成像来观察。 结果表明，通常用于锋利 AFM 金刚石尖端的纳米磨损测试的假设是，金刚石尖端太硬而不能被较软的材料磨损，这引入了所获得的测试材料磨损率值的误差。测试材料越硬，尖端磨损越大，因此测试材料的接触应力和观察到的磨损率越低。 (C) 1997 Elsevier Science S.A.
Wear of an AFM diamond tip, whose initial radius was 65 nm, sliding against single-crystalline silicon was observed both from the decreasing wear rate of the silicon with increasing number of cycles and from direct imaging of the diamond tip shape using a micro-fabricated Si3N4 AFM tip with a nominal radius of about 10-20 nm.It was shown that the assumption, which is usually used in nano-wear testing by a sharp AFM diamond tip, that the diamond tip is too hard to be worn by a softer material introduces an error into the value obtained for the tested material's wear rate. The harder the tested material, the greater is the tip wear, and, therefore, the lower are the contact stress and observed wear rate of the tested material. (C) 1997 Elsevier Science S.A.