Flow sensing by buckling monitoring of electrothermally actuated double-clamped micro beams
Flow sensing by buckling monitoring of electrothermally actuated double-clamped micro beams
复制标题
通过电热驱动双夹微梁的屈曲监测进行流量传感
DOI：
10.1063/1.4961582
复制
发表时间：
2016
影响因子：
4
通讯作者：
Alexander Liberzon
中科院分区：
文献类型：
--
作者：
Y. Kessler;S. Krylov;Alexander Liberzon
我们报告了一种流量传感方法，该方法基于微梁的偏转监测，该微梁因电热焦耳加热而产生压缩热应力而弯曲。对流冷却设备的气流会影响电流的临界屈曲值和结构的屈曲后挠度。校准后，可以从偏转测量中获得流速。长1000μm和2000μm、宽10μm、高30μm的单晶硅梁的准静态响应与耦合热电域、热流域和结构域的模型的预测一致。实验中记录了高达 1.5μm/(m/s) 的偏转灵敏度和高达 0.43mA/(m/s) 的临界电流灵敏度。我们的模型和实验结果证明了传感方法的可行性，并进一步表明简单、稳健且可能可缩小规模的梁型设备可能在流速和壁剪切应力方面有用......
We report on a flow sensing approach based on deflection monitoring of a micro beam buckled by the compressive thermal stress due to electrothermal Joule's heating. The air stream, convectively cooling the device, affects both the critical buckling values of the electric current and the postbuckling deflections of the structure. After calibration, the flow velocity can be obtained from the deflection measurements. The quasi-static responses of 1000 μm and 2000 μm long, 10 μm wide, and 30 μm high single crystal silicon beams were consistent with the prediction of the model, which couples thermoelectric, thermofluidic, and structural domains. The deflection sensitivity of up to 1.5 μm/(m/s) and the critical current sensitivity of up to 0.43 mA/(m/s) were registered in the experiments. Our model and experimental results demonstrate the feasibility of the sensing approach and further suggest that simple, robust, and potentially downscalable beam-type devices may have use in flow velocity and wall shear stress...