Planar Nanoactuators Based on VO2 Phase Transition
Planar Nanoactuators Based on VO2 Phase Transition
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DOI：
10.1021/acs.nanolett.0c02638
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发表时间：
2020-10-14
期刊：
影响因子：
10.8
通讯作者：
Pellegrino, Luca
中科院分区：
文献类型：
--
作者：
Manca, Nicola;Kanki, Teruo;Pellegrino, Luca
在微米和纳米尺度下的致动通常需要大的位移和施加的力。位于许多相变内部的高功能密度对于开发新的致动方案是一个吸引人的特征，特别是如果该转变是可逆的并且可扩展到小的致动域。在这里，我们展示了一个平面的纳米机械致动器的制造具有V型几何形状和基于VO 2的相变。该器件通过在室温以上加热来热激活，以触发与金属-绝缘体转变相关的VO 2晶体对称性变化。与标准材料相比，VO 2相变的大晶格膨胀被人字形几何形状进一步放大。直流和交流操作的设备进行了讨论。
Actuation at micro- and nanoscale often requires large displacements and applied forces. The high work energy density that lies inside many phase transitions is an appealing feature for developing new actuating schemes, especially if the transition is reversible and scalable into small actuating domains. Here, we show the fabrication of a planar nanomechanical actuator having chevron-type geometry and based on the phase transition of VO2. This device is thermally activated through heating just above room temperature to trigger the VO2 crystalline symmetry change associated with the metal-insulator transition. The large lattice expansion of VO2 phase transition, compared to standard materials, is further amplified by the chevron-type geometry. DC and AC operation of the device are discussed.