Tribological performances of the graphite-like carbon films deposited with different target powers in ambient air and distilled water
Tribological performances of the graphite-like carbon films deposited with different target powers in ambient air and distilled water
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DOI：
10.1016/j.triboint.2013.12.022
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发表时间：
2014-05
影响因子：
6.2
通讯作者：
Yongxin Wang;Jinlong Li;Lei Shan;Jianmin Chen;Q. Xue
中科院分区：
文献类型：
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作者：
Yongxin Wang;Jinlong Li;Lei Shan;Jianmin Chen;Q. Xue
采用磁控溅射技术在不同的靶电流下制备了类石墨碳（GLC）薄膜。随着靶电流的增加，薄膜的沉积速率和sp2位增加，薄膜的力学性能和致密度降低。在大气环境中，弹性模量的降低导致GLC膜的高摩擦。在蒸馏水中，如果GLC膜能够存活，则水润滑导致类似的低摩擦系数。机械性能的下降导致比磨损率的增加。在蒸馏水中，膜层致密性的降低导致比磨损率的增加。
Graphite-like carbon (GLC) films were deposited using magnetron sputtering technique with different target currents. With the increase of target current, the deposition rate and sp2site increased, while the mechanical properties and film compactness decreased. In ambient air, decreased elastic modulus led to the high friction of GLC film. In distilled water, water lubrication resulted in the similar low friction coefficients if the GLC film could survive. The decrease of mechanical properties caused the increase of specific wear rate in ambient air. The decrease of film compactness generated the increase of specific wear rate in distilled water.