Effective Use of Source Gas for Diamond Growth with Isotopic Enrichment
Effective Use of Source Gas for Diamond Growth with Isotopic Enrichment
复制标题
有效利用源气体通过同位素富集促进钻石生长
DOI：
10.7567/apex.6.055601
复制
发表时间：
2013
影响因子：
2.3
通讯作者：
J. Isoya
中科院分区：
文献类型：
--
作者：
T. Teraji;T. Taniguchi;S. Koizumi;Y. Koide;J. Isoya
本文提出了一种微波等离子体辅助化学气相沉积甲烷制备金刚石的新方法。通过平衡碳进料速率与反应器和金刚石生长的碳消耗速率来提高效率。最大转换效率高达80%。由此生长的12C富集的金刚石膜显示出约1000的高同位素富集。百分之九十九点九九八。
A new technique reported herein was proposed for high carbon conversion efficiency from methane to diamond in microwave plasma-assisted chemical vapor deposition. The efficiency is increased by balancing the carbon feeding rate with the reactor and carbon consumption rate for diamond growth. The maximum conversion efficiency was as great as 80%. 12C-enriched diamond films thus grown showed high isotopic enrichment of approx. 99.998%.