Flexible Implantable Microtemperature Sensor Fabricated on Polymer Capillary by Programmable UV Lithography With Multilayer Alignment for Biomedical Applications
Flexible Implantable Microtemperature Sensor Fabricated on Polymer Capillary by Programmable UV Lithography With Multilayer Alignment for Biomedical Applications
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DOI：
10.1109/jmems.2013.2269674
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发表时间：
2014-02
影响因子：
2.7
通讯作者：
Zhuo-qing Yang;Yi Zhang;T. Itoh;R. Maeda
中科院分区：
文献类型：
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作者：
Zhuo-qing Yang;Yi Zhang;T. Itoh;R. Maeda
本文提出并研制了一种可编程的多层对准圆柱基片紫外光刻系统。利用该系统可以在毛细管表面加工出各种不同图案的微结构，对准精度可达±1 μm。还研制了一套适用于毛细管基体的喷涂系统。设计并制作了一种用于热疗应用的柔性可植入式微温传感器，该传感器安装在直径为330 μm的聚合物毛细管上。有限元瞬态仿真表明，该传感器可实现~ 2 ms的快速响应。考虑到磁控溅射铂薄膜具有良好的阻温效应，采用其作为传感材料。所制作的柔性微传感器的测试电阻温度系数为0.0035/°C，这接近于体铂电阻传感器的工业标准值。测试了传感器在不同温度下的电流-电压曲线。温度传感器的测试灵敏度为1.485 Ω/°C。本柔性植入式微温传感器有望作为一种重要的生物医学介入监测装置。
In this paper, we present and develop a programmable UV lithography system with multilayer alignment for cylindrical substrates. By using this system various microstructures with different patterns can be fabricated on the capillary surface, and ±1 μm alignment precision can be realized. A home-made spray coating system is also developed for capillary substrates. A flexible implantable microtemperature sensor for hyperthermia application has been designed and fabricated on the polymer capillary with 330 μm diameter. The finite-element transient simulation indicates the sensor can realize ~ 2 ms quick response. Magnetron sputtered platinum film is used as the sensing material considering its good resistance-temperature effect. The test temperature coefficient of resistance of the fabricated flexible microsensors is 0.0035/°C, which is close to the industry standard value of the bulk Pt resistor sensor. The current-voltage curves of the sensor at different temperatures have been tested. The test sensitivity of the temperature sensor is 1.485 Ω/°C. The present flexible implantable microtemperature sensor is promising to be used as an important interventional monitoring device for biomedical applications.