Effect of laser scanning speed on geometrical features of Nd:YAG laser machined holes in thin silicon nitride substrate
Effect of laser scanning speed on geometrical features of Nd:YAG laser machined holes in thin silicon nitride substrate
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DOI：
10.1016/j.ceramint.2016.10.199
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发表时间：
2017-02
影响因子：
5.2
通讯作者：
Jinyang Zhang;Y. Long;Shixian Liao;Hua-Tay Lin;Chengyong Wang
中科院分区：
文献类型：
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作者：
Jinyang Zhang;Y. Long;Shixian Liao;Hua-Tay Lin;Chengyong Wang
0.5采用Nd：YAG二维激光加工（切割）系统，对添加MgO-Y2 O3的3 mm厚氮化硅（Si 3 N4）基片进行了孔加工研究。研究了激光扫描速度对加工孔的孔径、孔圆度、锥度、热影响区、重铸层和微裂纹等特征的影响。结果表明，在不同扫描速度下加工的孔，其正面直径均大于背面直径。随着点扫描速度的增加，加工孔的锥角减小，孔的圆度增大。此外，在钻孔背面附近观察到了清晰的热影响区（HAZ），其面积随着激光光斑扫描速度的增加而减小。结果表明，当激光扫描速度为20 mm/min时，热影响区最大，而当激光扫描速度为60 mm/min时，加工孔不能完全穿透基体厚度，为获得质量较好的孔，激光扫描速度应控制在30 ~ 50 mm/min之间。
0.5 mm thick Silicon nitride (Si3N4) substrates with MgO-Y2O3additives were employed for hole machining study with a Nd:YAG two-dimensional laser machining (cutting) system. The effects of laser scanning speed on features of the machined holes such as hole diameter, hole circularity, taper angle, heat affected zone (HAZ), recast layer, and micro-cracks were studied. The results show that the diameters at the front side are larger than the back side for all holes machined at different spot scanning speed. The taper angle of the machined holes decreases, while the hole circularity increases with the increase of the spot scanning speed. In addition, the heat-affected-zone (HAZ) was observed clearly around the back side of drilled holes, whose area decreases with the increase of the laser spot scanning speed. The result shows that the HAZ is the largest when the laser scanning speed is 20 mm/min. Nevertheless, the machined hole did not completely cross through the thickness of the substrate when the laser scanning speed was 60 mm/min. To obtain holes with relatively good quality, laser scanning speed should be controlled between 30 mm/min and 50 mm/min.