MICRO-LIQUID FLOW SENSOR

MICRO-LIQUID FLOW SENSOR
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DOI:
10.1016/0924-4247(93)80010-e
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发表时间:
1993-06-01
影响因子:
4.6
通讯作者:
FLUITMAN, JHJ
FLUITMAN, JHJ
中科院分区:
工程技术3区
文献类型:
--
作者:
LAMMERINK, TSJ;TAS, NR;FLUITMAN, JHJ

文献摘要

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提出了一种实现简单、灵敏度高的微液流传感器。该传感器基于众所周知的热风速计原理。提出了一种适用于气/液流体的传感器行为的分析模型。描述了传感器的实现过程。模型与实验结果吻合较好。该传感器易于与其他微量液体处理部件(如泵、混合器等)集成。
A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer principles. An analytical model for the sensor behaviour applicable for gas/liquid fluids is presented. The realisation process of the sensor is described. Model and experimental results agree well. The sensor is simple to integrate with other micro-liquid handling components such as pumps, mixers, etc.