2D magnetic microsensor with on-chip signal processing for contactless angle measurement
2D magnetic microsensor with on-chip signal processing for contactless angle measurement
复制标题
具有片上信号处理功能的 2D 磁性微传感器,用于非接触式角度测量
DOI:
10.1109/isscc.1996.488641
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发表时间:
1996
期刊:
影响因子:
--
通讯作者:
H. Baltes
中科院分区:
文献类型:
--
作者:
A. Haberli;M. Schneider;P. Malcovati;R. Castagnetti;F. Maloberti;H. Baltes
This microsystem is the key element for accurate contactless angle measurements in combination with a permanent magnet. The system is based on a novel approach for signal processing using an on-board incremental ADC and a two-dimensional (2D) magnetic microsensor allowing 1/spl deg/ resolution. The system can be used for various wear-free angular positioning control systems in industrial and automotive applications.