Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths
Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths
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DOI：
10.1063/1.4803541
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发表时间：
2013-04-29
影响因子：
4
通讯作者：
O'Faolain, Liam
中科院分区：
文献类型：
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作者：
Debnath, Kapil;Gardes, Frederic Y.;O'Faolain, Liam
我们提出了一种基于氮化硅波导垂直耦合到硅光子晶体腔的1550 nm波长窗口中的光检测方法。硅中的吸收来自离子注入产生的深能级，从而提供优异的CMOS兼容性。在-10 V反向偏压下，器件的响应度为0.108 A/W，暗电流为9.4 nA。我们的工作展示了迄今为止实现的最小波长选择光电探测器之一。通过级联这样的检测器，我们也证明了一个双通道解复用器。(C)2013 AIP Publishing LLC
We present a method for detecting light in the 1550 nm wavelength window based on a silicon nitride waveguide that is vertically coupled to a silicon photonic crystal cavity. The absorption in silicon arises from deep-levels created by ion implantation, thereby providing excellent CMOS compatibility. We demonstrate a responsivity of 0.108 A/W at -10 V reverse bias with a dark current of 9.4 nA. Our work demonstrates one of the smallest wavelength selective photodectors realised to date. By cascading such detectors we also demonstrate a two-channel demultiplexer. (C) 2013 AIP Publishing LLC