Fabrication of three-dimensional 1 x 4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam.
Fabrication of three-dimensional 1 x 4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam.
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DOI：
10.1364/oe.18.012136
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发表时间：
2010-06
期刊：
影响因子：
3.8
通讯作者：
M. Sakakura;Tsutomu Sawano;Y. Shimotsuma;K. Miura;K. Hirao
中科院分区：
文献类型：
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作者：
M. Sakakura;Tsutomu Sawano;Y. Shimotsuma;K. Miura;K. Hirao
利用空间光调制器（SLM）调制激光束的空间相位分布，可以产生多个光斑。在本文中，我们演示了三维1 × 4分束器波导内的玻璃聚焦多个光斑的飞秒（fs）激光脉冲，这可以通过切换空间相位分布的SLM控制。在传统的飞秒激光写入技术中，高精度的衬底定位对于在分束器中制造分支波导是必不可少的。利用本文提出的技术，只需平移一次玻璃基片，就可以制作出连续分支波导，因此，这种技术可以消除对基片定位精度的要求，节省制作时间。
Multiple light spots can be generated by modulating the spatial phase distribution of laser beam with a spatial light modulator (SLM). In this paper, we demonstrate the fabrication of three-dimensional 1 x 4 splitter waveguides inside a glass by focusing multiple light spots of femtosecond (fs) laser pulses, which can be controlled by switching spatial phase distributions on an SLM. In the conventional fs laser writing technique, a highly precise positioning of a substrate is essential for fabricating a branched waveguide in a splitter. Using the technique proposed in this paper, a continuously branched waveguide can be produced easily by translating a glass substrate only one time; therefore this technique can eliminate the need for a high precision in positioning of a substrate and save a fabrication time.