Using the in situ lift-out technique to prepare TEM specimens on a single-beam FIB instrument
Using the in situ lift-out technique to prepare TEM specimens on a single-beam FIB instrument
复制标题
使用原位提升技术在单束 FIB 仪器上制备 TEM 样品
DOI：
10.1088/1742-6596/126/1/012028
复制
发表时间：
2008
期刊：
影响因子：
--
通讯作者：
B. Shollock
中科院分区：
文献类型：
--
作者：
M. Lekstrom;M. McLachlan;S. Husain;D. McComb;B. Shollock
如今，透射电子显微镜 (TEM) 样品通常使用聚焦离子束 (FIB) 仪器制备。具体来说，提出方法已成为一种越来越流行的技术，涉及从特定位置去除薄横截面并将其转移到 TEM 网格。该提取过程可以在异位或在原位进行。后者主要在双束 FIB 和扫描电子显微镜（SEM）组合系统上进行，而传统的单束仪器通常仅限于传统的异位方法。然而，仍然希望增强现有单束仪器的能力，以允许进行原位提出准备，因为该技术比旧的非原位方法具有许多优点。因此，对单束 FIB 仪器进行了改造，加入了配备钨针的原位显微操作器，可以使用离子束诱导铂沉积将其连接到切割的 FIB 部分。本文讨论了使用离子束监测原位操纵过程的问题，以及可用于在两个物体之间创建更牢固的铂焊缝的方法，最后，讨论了如何限制离子束对样品表面损坏的程度。
Transmission electron microscope (TEM) specimens are today routinely prepared using focussed ion beam (FIB) instruments. Specifically, the lift-out method has become an increasingly popular technique and involves removing thin cross-sections from site-specific locations and transferring them to a TEM grid. This lift-out process can either be performed ex situ or in situ. The latter is mainly carried out on combined dual-beam FIB and scanning electron microscope (SEM) systems whereas conventional single-beam instruments often are limited to the traditional ex situ method. It is nevertheless desirable to enhance the capabilities of existing single-beam instruments to allow for in situ lift-out preparation to be performed since this technique offers a number of advantages over the older ex situ method. A single-beam FIB instrument was therefore modified to incorporate an in situ micromanipulator fitted with a tungsten needle, which can be attached to a cut-out FIB section using ion beam induced platinum deposition. This article addresses the issues of using an ion beam to monitor the in situ manipulation process as well as approaches that can be used to create stronger platinum welds between two objects, and finally, views on how to limit the extent of ion beam damage to the specimen surface.