Periodically Aligned Submicron Lines of Silicon and Nickel Fabricated using Linearly Polarized Nd:YAG Pulse Laser
Periodically Aligned Submicron Lines of Silicon and Nickel Fabricated using Linearly Polarized Nd:YAG Pulse Laser
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DOI：
10.1143/jjap.46.4154
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发表时间：
2007-07
影响因子：
1.5
通讯作者：
K. Nishioka;S. Horita
中科院分区：
文献类型：
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作者：
K. Nishioka;S. Horita
用线偏振Nd:YAG脉冲激光束照射沉积在二氧化硅（SiO2）薄膜上的非晶硅（a-Si）薄膜，在二氧化硅（SiO2）薄膜上制备了周期性排列的亚微米硅线。入射光束与散射表面波之间的干涉导致辐照样品表面的光束能量密度分布具有空间周期性。利用激光束熔化10nm厚的A - si薄膜，熔融薄膜根据能量密度的周期性分布，由于其表面的拉伸作用而被分离和凝聚。最终，在SiO2薄膜上形成了周期性的亚微米多晶Si线。此外，我们将该技术应用于Ni薄膜，在SiO2薄膜上获得了周期性排列的亚微米Ni线。根据液态材料在SiO2薄膜上的表面拉伸特性，讨论了Si线和Ni线的区别。
Periodically aligned submicron Si lines were fabricated on a silicon dioxide (SiO2) film by only irradiating a linearly polarized Nd:YAG pulse laser beam to an amorphous Si (a-Si) thin film deposited on the SiO2 film. The interference between an incident beam and a scattered surface wave leads to the spatial periodicity of beam energy density distribution on the surface of the irradiated samples. A 10-nm-thick a-Si thin film was melted using a laser beam, and the molten thin film was separated and condensed owing to its surface tensile according to the periodic energy density distribution. Eventually, the submicron polycrystalline Si lines were formed periodically on the SiO2 film. Moreover, we applied this technique to a Ni thin film, and the periodically aligned submicron Ni lines were obtained on the SiO2 film. The differences between the Si and Ni lines were discussed on the basis of the surface tensile of liquid materials on the SiO2 film.