Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor
Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor
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用于优化微加工电化学氧传感器中聚合物电解质性能的测试结构
DOI：
10.1109/icmts.2017.7954280
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
A. Walton
中科院分区：
文献类型：
--
作者：
J.R.K. Marland;C. Dunare;A. Tsiamis;E. González;E. Blair;S. Smith;J. Terry;A. Murray;A. Walton
为了优化电化学氧传感器中的图案化固体聚合物电解质的设计和制造，产生了测试结构。测量结果表明，光刻胶显影剂和下面的绝缘体材料的选择影响聚合物结构的耐久性。由聚合物覆盖的测试电极在支持电化学氧检测方面是有效的。
Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.