Micromachined Vertical Cavity Surface Emitting Lasers - Athermalization, Tuning and Multi-wavelength Integration -
Micromachined Vertical Cavity Surface Emitting Lasers - Athermalization, Tuning and Multi-wavelength Integration -
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微机械垂直腔表面发射激光器 - 无热化、调谐和多波长集成 -
DOI：
10.1109/jstqe.2015.2389522
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发表时间：
2015
影响因子：
4.9
通讯作者：
Fumio Koyama,Masanori Nakahama
中科院分区：
文献类型：
--
作者：
Masanori Nakahama;Takahiro Sakaguchi;Akihiro Matsutani;Fumio Koyama;Fumio Koyama,Masanori Nakahama
综述了微机械垂直腔面发射激光器的波长工程，包括波长消热化、波长调谐和多波长集成。热致动悬臂梁的集成使我们能够定制激光波长的温度依赖性。传统单模半导体激光器中激光波长的热漂移（通常为0.07 nm/K）可以通过使用悬臂镜的热驱动来补偿。我们能够实现“无热操作”的VCSEL在非制冷操作。这种新的功能可能是有用的WDM光互连，局域网，和接入网络下的非制冷操作下的窄信道间隔。此外，连续波长调谐可以通过使用悬臂梁结构的静电力或静电力致动来实现，这同时提供了无热和可调谐操作。此外，光刻定义的非热VCSEL阵列的多波长集成的地址。
We review the wavelength engineering of micromachined vertical cavity surface emitting lasers (VCSELs), including the wavelength athermalization, wavelength tuning, and multiple wavelength integration. The integration of a thermally actuated cantilever enables us to tailor the temperature dependence of lasing wavelengths. The thermal drift of lasing wavelengths in conventional single-mode semiconductor lasers, which is typically 0.07 nm/K, can be compensated by using the thermal actuation of a cantilever mirror. We are able to realize “athermal operation” of VCSELs under uncooled operations. This novel function could be useful for WDM optical interconnects, local area networks, and access networks with narrow channel spacing under uncooled operations. In addition, continuous wavelength tuning can be realized by using either electrothermal or electrostatic force actuation of the cantilever structure, which provides the athermal and tunable operation at the same time. Also, the lithography defined multiwavelength integration of an athermal VCSEL array is addressed.