Investigating the effect of Casimir and van der Waals attractions on the electrostatic pull-in instability of nano-actuators
Investigating the effect of Casimir and van der Waals attractions on the electrostatic pull-in instability of nano-actuators
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DOI：
10.1088/0031-8949/82/04/045801
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发表时间：
2010-10-01
期刊：
影响因子：
2.9
通讯作者：
Abadyan, M.
中科院分区：
文献类型：
--
作者：
Soroush, R.;Koochi, A.;Abadyan, M.
本文研究了色散（货车德瓦尔斯和卡西米尔）力对悬臂纳米致动器吸合不稳定性的影响，考虑其应用范围。引入Adomian分解，得到分布参数模型的解析解。色散力降低了纳米致动器的拉入偏转和电压。然而，边缘场增加了吸合偏转，同时降低了致动器的吸合电压。确定了致动器的最小初始间隙和由于货车德瓦尔斯和卡西米尔吸引力而不粘到衬底上的分离长度。此外，所提出的方法是能够确定的致动器的应力分布在不稳定的发病。可以看出，Casimir和货车德瓦尔斯吸引力有效地降低了最大值的应力合成在不稳定的开始。结果表明，Adomian分解是一种可靠的方法来模拟纳米结构在亚微米范围。
This paper investigates the effect of dispersion (van der Waals and Casimir) forces on the pull-in instability of cantilever nano-actuators by considering their range of application. Adomian decomposition is introduced to obtain an analytical solution of the distributed parameter model. Dispersion forces decrease the pull-in deflection and voltage of a nano-actuator. However, the fringing field increases the pull-in deflection while decreasing the pull-in voltage of the actuator. The minimum initial gap and the detachment length of the actuator that does not stick to the substrate due to van der Waals and Casimir attractions were determined. Furthermore, the proposed approach is capable of determining the stress distribution of the actuator at the onset of instability. It is seen that Casimir and van der Waals attractions effectively reduce the maximum value of stress resultants at the onset of instability. The results indicate that Adomian decomposition is a reliable method for simulating nano-structures at submicrometer ranges.