Photoluminescence Intensity Dependence on Germanium Concentration in Silicon Dioxide Layer Formed by Multi-Energy Negative-Ion Implantation
Photoluminescence Intensity Dependence on Germanium Concentration in Silicon Dioxide Layer Formed by Multi-Energy Negative-Ion Implantation
复制标题
多能负离子注入形成的二氧化硅层中的光致发光强度与锗浓度的关系
DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
and J. Ishikawa
中科院分区:
文献类型:
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作者:
H. Tsuji;N. Arai;K. Kojima;M. Hattori;T. Ishibashi;K. Adachi;H. Kotaki;Y. Gotoh;and J. Ishikawa