High-Frequency Electrodeless Quartz Crystal Microbalance Chip with a Bare Quartz Resonator Encapsulated in a Silicon Microchannel
High-Frequency Electrodeless Quartz Crystal Microbalance Chip with a Bare Quartz Resonator Encapsulated in a Silicon Microchannel
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DOI：
10.1143/jjap.50.07hd03
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发表时间：
2011-07-01
影响因子：
1.5
通讯作者：
Hirao, Masahiko
中科院分区：
文献类型：
--
作者：
Kato, Fumihito;Ogi, Hirotsugu;Hirao, Masahiko
我们提出了一种高频无电极石英晶体微天平（QCM）芯片与裸石英谐振器封装在硅微通道，这是由微机械加工技术制造。该QCM芯片封装了一个AT切割的石英片，长2.5mm，宽1.7mm，厚9.6 μ m，由微柱支撑，没有固定部件。由于不需要处理易碎的石英谐振器，因此在组装期间不存在破坏问题。石英谐振器是无电极的，不固定;因此，没有由于电极和接触线的损失。结果，可以获得高品质因数（Q因数）和高信噪比（SNR）。在170 MHz下，载体溶液流中的Q因子约为800-2800。此外，可以重复使用该装置，因为石英表面可以非特异性地吸附受体蛋白，其可以通过用在微通道中流动的强酸溶液进行洗涤程序来去除。封装在微通道中的高频石英谐振器（170 MHz）可以降低粘度对频移的影响，实现高灵敏度和定量分析。QCM芯片被激励，并通过线天线非接触地检测石英谐振器的剪切振动。因此，石英谐振器的两侧都可以用作溶液中的检测区域。我们成功地检测人免疫球蛋白G（hIgG）在6 μ g/ml的浓度通过葡萄球菌蛋白A（SPA）的非特异性固定在开发的QCM芯片在真实的时间没有任何标记。(c)2011日本应用物理学会
We present a high-frequency electrodeless quartz crystal microbalance (QCM) chip with a bare quartz resonator encapsulated in a silicon microchannel, which is fabricated by micromachining technology. This QCM chip packages an AT-cut quartz plate 2.5mm long, 1.7mm wide, and 9.6 mu m thick, which is supported by micropillars without fixed parts. There is no issue about destruction during assembly because handling the fragile quartz resonator becomes unnecessary. The quartz resonator is electrodeless and not fixed; therefore, there are no losses due to electrodes and contacting wires. As a result, a high quality factor (Q-factor) and a high signal-to-noise ratio (SNR) can be obtained. The Q-factor is about 800-2800 at 170 MHz in the flow of the carrier solution. In addition, it is possible to reuse the device, because the quartz surfaces can adsorb receptor proteins nonspecifically, which can be removed by a washing procedure with a strong acid solution flowed in the microchannel. The high-frequency quartz resonator (170 MHz) encapsulated in the microchannel can reduce the influence of the viscosity contribution to the frequency shift, achieving highly sensitive and quantitative analysis. The QCM chip is excited and detects the shear vibrations of the quartz resonator by the line antennas without contact. Consequently, both sides of the quartz resonator can be used as the detection area in a solution. We succeeded in detecting the human immunoglobulin G (hIgG) at a concentration of 6 mu g/ml via the staphylococcal protein A (SPA) immobilized nonspecifically on the developed QCM chip in real time without any labeling. (c) 2011 The Japan Society of Applied Physics