Time-dependent two-temperature chemically non-equilibrium modelling of high-power Ar–N2 pulse-modulated inductively coupled plasmas at atmospheric pressure
Time-dependent two-temperature chemically non-equilibrium modelling of high-power Ar–N2 pulse-modulated inductively coupled plasmas at atmospheric pressure
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DOI：
10.1088/0022-3727/39/2/011
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发表时间：
2006-01
期刊：
影响因子：
--
通讯作者：
Yasunori Tanaka
中科院分区：
文献类型：
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作者：
Yasunori Tanaka
建立了大气压下高功率Ar-N2脉冲调制电感耦合等离子体（PMICP）的含时二维双温化学非平衡模型。高功率PMICP是一种维持高功率感应等离子体的新技术。它可以在时域内控制等离子体温度和自由基密度。PMICP通过突然施加电场促进非平衡效应，即使在高功率密度等离子体中也是如此。该模型分别考虑了电子和重粒子随时间变化的能量守恒方程。该模型还考虑了反应热效应、电子与重粒子之间的能量传递以及由粒子密度梯度引起的扩散引起的焓流。还通过求解每个粒子的与时间相关的质量守恒方程，考虑30个化学反应产生的扩散、对流和净生产项，来考虑化学非平衡效应。采用Chapman-Enskog方法的一级近似，利用局域粒子组成、重粒子温度和电子温度，自洽地计算了Ar-N2等离子体的输运和热力学性质.该模型可用于讨论温度、气体流场和化学组分分布的时间演化。
A time-dependent, two-dimensional, two-temperature and chemical non-equilibrium model was developed for high-power Ar–N2 pulse-modulated inductively coupled plasmas (PMICPs) at atmospheric pressure. The high-power PMICP is a new technique for sustaining high-power induction plasmas. It can control the plasma temperature and radical densities in the time domain. The PMICP promotes non-equilibrium effects by a sudden application of electric field, even in the high-power density plasmas. The developed model accounts separately for the time-dependent energy conservation equations of electrons and heavy particles. This model also considers reaction heat effects and energy transfer between electrons and heavy particles as well as enthalpy flow resulting from diffusion caused by the particle density gradient. Chemical non-equilibrium effects are also taken into account by solving time-dependent mass conservation equations for each particle, considering diffusion, convection and net production terms resulting from 30 chemical reactions. Transport and thermodynamic properties of Ar–N2 plasmas are calculated self-consistently using the first order approximation of the Chapman–Enskog method at each position and iteration using the local particle composition, heavy particle temperature and electron temperature. This model is useful to discuss time evolution in temperature, gas flow fields and distribution of chemical species.