Physical Processes-Aided Periodic Micro/Nanostructured Arrays by Colloidal Template Technique: Fabrication and Applications
Physical Processes-Aided Periodic Micro/Nanostructured Arrays by Colloidal Template Technique: Fabrication and Applications
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DOI：
10.1002/chin.201325186
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发表时间：
2013-06
期刊：
影响因子：
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通讯作者：
Yuenkei Li;G. Duan;Guangqiang Liu;W. Cai
中科院分区：
文献类型：
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作者：
Yuenkei Li;G. Duan;Guangqiang Liu;W. Cai
它已被证明，使用胶体模板是一个简单，灵活的策略来创建周期性的微/纳米结构阵列相比，光刻，电子束光刻等利用胶体单层作为模板或掩模，不同的周期性微/纳米结构阵列，包括纳米颗粒阵列，孔阵列，纳米环阵列和纳米棒/纳米管阵列可以通过化学和物理过程制造。化学方法包括直接溶液/溶胶浸渍法、湿法化学腐蚀、电沉积、电泳沉积等，具有操作简单、成本低的优点。但由于前驱体分解不完全、表面活性剂在自组装或电化学沉积过程中的残留等原因，阵列表面存在杂质。更重要的是，通过上述途径在大面积上实现非常均匀的微/纳米结构阵列的形态是相当困难的。而另一种方法，即物理途径（如：反应离子刻蚀、脉冲激光沉积、热蒸发沉积、原子层沉积、溅射沉积）与胶体单层模板相结合，可以很好地解决这些问题。本文着重介绍了近年来基于胶体模板的微/纳米结构阵列的物理制备方法。利用不同周期性的胶体模板和不同的物理过程实验条件，可以调节微结构或纳米结构的参数。本文还介绍了具有可控形貌和排列参数的微/纳米结构阵列在自清洁表面、增强催化性能、场发射体等方面的应用。
It has been proven that the use of colloidal templates is a facile, flexible strategy to create the periodic micro/nanostructured arrays in comparison with photolithography, electron beam lithography etc. Utilizing colloidal monolayers as templates or masks, different periodic micro/nanostructured arrays including nanoparticle arrays, pore arrays, nanoring arrays and nanorod/nanotube arrays can be fabricated by chemical and physical processes. Chemical routes, including direct solution/sol dipping strategy, wet chemical etching, electrodeposition, electrophoretic deposition etc. have advantages of simple operation and low costs. However, they have some disadvantages of impurities on surface of arrays due to incomplete decomposition of precursors, residue of surfactants in self-assembling or electrochemical deposition. More importantly, it is quite difficult to achieve very uniform morphology of micro/nanostructure arrays on a large-area by the above routes. Whereas another method, a physical route (for instance: reactive ion etching, pulsed laser deposition, thermal evaporation deposition, atomic layer deposition, sputtering deposition), combining with colloidal monolayer template can well resolve these problems. In this review, we focus on introducing the recent progress in creating micro/nanostructured arrays based on colloidal templates with physical routes. The parameters of the microstructure or nanostructure can be tuned by colloidal templates with different periodicity and experimental conditions of the physical processes. The applications of micro/nanostructured arrays with controllable morphology and arrangement parameters in self-cleaning surfaces, enhanced catalytic properties, field emitters etc. are also presented in the following sections.