Nano-dimensional analysis for practical materials using the nano-beam SIMS apparatus
Nano-dimensional analysis for practical materials using the nano-beam SIMS apparatus
复制标题
使用纳米束 SIMS 装置对实际材料进行纳米尺寸分析
DOI：
10.1380/ejssnt.2004.131
复制
发表时间：
2004
影响因子：
0.7
通讯作者：
Y. Nihei
中科院分区：
文献类型：
--
作者：
M. Nojima;M. Toi;A. Maekawa;B. Tomiyasu;T. Sakamoto;M. Owari;Y. Nihei
我们研制的纳米束二次离子质谱（西姆斯）装置可以实现高空间分辨率和高效率的二次离子检测。本文介绍了纳米束二次离子西姆斯）方法用于实际材料接触孔的表征。离子感生二次电子（伊势）图像和离子感生二次离子（ISI）图像的对比度不同。讨论了信息深度和化学敏感性的差异。元素图获得了纳米尺度和地图提供了样品的许多方面。[DOI：10.1380/ejssnt.2004.131]
We have been developing the nano-beam secondary ion mass spectrometry (SIMS) apparatus, which can realize high spatial resolution and high efficiency of secondary ion detection. In this paper, the nano-beam SIMS method was introduced for the purpose of characterization for practical materials: contact holes. Contrasts of ion induced secondary electron (ISE) image and ion induced secondary ion (ISI) image were different. The difference was discussed with respect to information depth and chemical sensitivity. Elemental maps were obtained with nano-dimension and the maps provided many aspects of the sample. [DOI: 10.1380/ejssnt.2004.131]