Frequency latching in nonlinear micromechanical resonators
Frequency latching in nonlinear micromechanical resonators
复制标题
非线性微机械谐振器中的频率锁存
DOI：
10.1063/1.4979829
复制
发表时间：
2017-04-03
影响因子：
4
通讯作者：
Huan, Ronghua
中科院分区：
文献类型：
--
作者：
Wei, Xueyong;Zhang, Tianyi;Huan, Ronghua
非线性微机械谐振器的谐振频率依赖于其模态振幅，称为a -f效应。在这里，我们通过实验证明了A-f效应可以被微机械谐振器中的模式相互作用所限制。本文所研究的箝位-箝位光束谐振器具有非线性面内振动模式和线性面外振动模式。在不同Vdc的单端驱动情况下，通过A-f效应调谐的IP模式谐振频率达到OOP模式的谐振频率，由于模态相互作用和静电软化效应，受到OOP模式的限制。而在双端驱动的情况下，经过a -f调谐后，IP模式的谐振频率被锁存到OOP模式的谐振频率上，观察到一个频率稳定区域。通过数值模拟，提出了一个理论模型来解释这一现象。AIP出版社出版。
The resonance frequency of a nonlinear micromechanical resonator has a dependence on its modal amplitude known as the A-f effect. Here, we experimentally demonstrated that the A-f effect can be limited by the mode interaction in micromechanical resonators. The clamped-clamped beam resonator investigated in this work has a nonlinear in-plane (IP) vibration mode and a linear outof- plane (OOP) vibration mode. In the case of single ended driving with various Vdc, the resonance frequency of the IP mode tuned through the A-f effect reaches that of the OOP mode and is limited by the OOP mode due to the modal interaction and electrostatic softening effect. In the case of double ended driving, however, the resonance frequency of the IP mode is latched to that of the OOP mode after A-f tuning and a frequency stabilized region is observed. A theoretical model is also put forward to explain this phenomenon through numerical simulations. Published by AIP Publishing.