Design and characterization of AlN-based in-plane microplate resonators
Design and characterization of AlN-based in-plane microplate resonators
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DOI：
10.1088/0960-1317/23/7/074003
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发表时间：
2013-07-01
影响因子：
2.3
通讯作者：
Sanchez-Rojas, J. L.
中科院分区：
文献类型：
--
作者：
Ruiz-Diez, V.;Manzaneque, T.;Sanchez-Rojas, J. L.
在本文中，一个设计过程，以执行一个有效的驱动压电谐振器的面内模式。该程序适用于不同的微板结构，注意两个平面内模式的家庭：轮廓模式和弯曲驱动模式。两个系列的一组代表性器械用作说明性示例。这些设备的特点是通过测量阻抗和他们的面内模态形状测量与一种新的技术的基础上散斑干涉。品质因数或动态电阻等品质指标被用来评估不同的设计方法。
In this paper, a design procedure to perform an efficient actuation of in-plane modes in piezoelectric resonators is presented. This procedure is applied to different microplate structures, paying attention to two in-plane mode families: contour modes and flexure-actuated modes. A representative set of devices from both families were used as illustrative examples. These devices were characterized electrically by measuring the impedance and their in-plane modal shapes were measured with a novel technique based on speckle-pattern interferometry. Figures of merit such as the quality factor or the motional resistance were obtained and used to evaluate the different design approaches.