Fourier Analysis of Interference Structure in X-Ray Specular Reflection from Thin Films
Fourier Analysis of Interference Structure in X-Ray Specular Reflection from Thin Films
复制标题
薄膜 X 射线镜面反射干涉结构的傅里叶分析
DOI：
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发表时间：
1992
期刊：
影响因子：
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通讯作者：
K. Iida
中科院分区：
文献类型：
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作者：
K. Iida
用傅里叶变换算法分析了X射线薄膜全外反射中的干涉振荡现象。傅立叶空间中的峰位置与层厚度良好一致，并且独立于表面/界面粗糙度来确定。介绍了该技术的原理及其在SiO2/Si薄膜中的应用。文中还讨论了利用可调谐同步辐射X射线进行实验的优点。
Interference oscillation observed in X-ray total external reflection from thin films was analyzed by the Fourier transform algorithm. The peak position in Fourier space was in good agreement with the layer thickness, and was determined independently from the surface/interface roughness. The principle of the present technique and its application to SiO2/Si thin films are shown. The advantages of the experiments using tunable synchrotron X-rays are also discussed.