A MEMS hardness sensor with reduced contact force dependence based on the reference plane concept aimed for medical applications
A MEMS hardness sensor with reduced contact force dependence based on the reference plane concept aimed for medical applications
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基于参考平面概念的 MEMS 硬度传感器，可减少接触力依赖性，适用于医疗应用
DOI：
10.7567/jjap.55.04ef11
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发表时间：
2016
影响因子：
1.5
通讯作者：
H. Takao
中科院分区：
文献类型：
--
作者：
Y. Maeda;K. Terao;F. Shimokawa;H. Takao
本文对一种具有“参考平面”结构的MEMS硬度传感器的稳定检测原理进行了理论分析和实验验证。通过对参考平面的优化设计，实现了与接触力不稳定性无关的硬度测量。对所制造的装置进行评价，并且在稳定的接触力下在A1至A54的范围内获得“海岸A”硬度等级（JIS K 6301 A）作为参考。使用我们的参考平面设计，接触力对硬度传感器信号的依赖性有效地降低了96.6%。在5 N接触力以下，硬度的最大信号误差被抑制到A8。该结果对应于即使在接触力不稳定的情况下对脂肪硬度的检测能力。通过实验，证明了在不对接触力进行任何控制的情况下，人体硬度的稳定检测。
In this study, the stable detection principle of a MEMS hardness sensor with “reference plane” structure is theoretically analyzed and demonstrated with experimental results. Hardness measurement independent of contact force instability is realized by the optimum design of the reference plane. The fabricated devices were evaluated, and a “shore A” hardness scale (JIS K 6301 A) was obtained as the reference in the range from A1 to A54 under a stable contact force. The contact force dependence on hardness sensor signals was effectively reduced by 96.6% using our reference plane design. Below 5 N contact force, the maximal signal error of hardness is suppressed to A8. This result corresponds to the detection capability for fat hardness, even when the contact force is unstable. Through experiments, stable detection of human body hardness has been demonstrated without any control of contact force.
一种利用参考平面结构检测表面摩擦力和硬度的新型集成触觉图像传感器
DOI：
--
发表时间：
2012
期刊：
Proc. IEEE Sensors2012 Conference
影响因子：
--
作者：
Y. Kondo;A. Ashida;N. Nouzu;N. Fujimura;Y.Tanaka;Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao
通讯作者：
Y. Maeda; K. Terao; T. Suzuki; F. Shimokawa; H. Takao