Morphological investigation at the front and rear surfaces of fused silica processed with femtosecond laser pulses in air.
Morphological investigation at the front and rear surfaces of fused silica processed with femtosecond laser pulses in air.
复制标题
在空气中用飞秒激光脉冲处理的熔融石英的前表面和后表面的形态研究。
DOI：
10.1364/oe.10.001244
复制
发表时间：
2002
期刊：
影响因子：
3.8
通讯作者：
Q. Gong
中科院分区：
文献类型：
--
作者：
Zhaoxin Wu;Hongbing Jiang;Zhaohui Zhang;Quan Sun;Hong Yang;Q. Gong
在紧密聚焦条件下（NA = 0.4），观察了807 nm飞秒激光脉冲对熔融二氧化硅前后表面的不同响应。光束路径表面形貌对焦点位置高度敏感。通过调整聚焦位置，不仅可以产生亚微米腔，还可以产生亚微米气泡。通过将激光束聚焦在后表面而不是前表面，我们实现了更高质量的微加工和更好的空间分辨率（400 nm）。
Different responses for the front (entrance) and the rear (exit) surfaces of fused silica processed with femtosecond laser pulses at 807 nm were observed under tight focusing conditions (NA = 0.4). The morphology of the surface in the beam path is highly sensitive to the focus position. By adjusting the focus position, we can produce not only a submicrometer cavity but also a submicrometer bubble. We achieved higher-quality micromachining and a better spatial resolution (400 nm) by focusing the laser beam at the rear surface rather than at the front surface.