X-ray photon counting performance of front-illuminated scientific CMOS image sensor
X-ray photon counting performance of front-illuminated scientific CMOS image sensor
复制标题
前照式科学CMOS图像传感器的X射线光子计数性能
DOI：
10.1117/12.2562976
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发表时间：
2020
期刊：
影响因子：
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通讯作者：
Hiroshi Nakajima et al.
中科院分区：
文献类型：
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作者：
Junko S. Hiraga;Hiroshi Nakajima et al.
We developed an X-ray imaging spectrometer with a high timing resolution. CMOS image sensors, widely used in optical imaging, have an excellent time resolution with considerably low readout noise. We performed experiments using a Zyla CMOS image sensor manufactured by Andor Technology pic. (UK). It employs a front illuminated(FI) scientific CMOS (sCMOS) with each pixel size of 6.5×6.5μm2. We found that nearly all X-ray events spread more than 5×5 pixels and obtained good energy resolution of 260 eV at 5.9 keV at room temperature. The spectrum shows no degradation at lower energy, which imply that there is negligibly small charge loss. We report photon counting performance for a broad range of X-rays from 3-25keV at room temperature.
