Integrated Wireless Microfluidic Liquid Sensors Based on Low Temperature Co-Fired Ceramic (LTCC) Technology
Integrated Wireless Microfluidic Liquid Sensors Based on Low Temperature Co-Fired Ceramic (LTCC) Technology
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DOI：
10.1016/j.sna.2022.113840
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发表时间：
2022-08
期刊：
影响因子：
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通讯作者：
Tingting He;Mingsheng Ma;Hao Li;Faqiang Zhang;Feng Liu;Zhifu Liu;Xiaogan Li
中科院分区：
文献类型：
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作者：
Tingting He;Mingsheng Ma;Hao Li;Faqiang Zhang;Feng Liu;Zhifu Liu;Xiaogan Li
本文介绍了一种基于微波反射原理的用于液体检测的无线微流控传感器。所提出的传感器包括缝隙天线和基板集成波导（SIW）谐振器，该谐振器使用低温共烧陶瓷（LTCC）技术与微通道集成。为了优化传感器结构，进行了电磁仿真。分别使用0-50%摩尔分数的乙醇水溶液和0-600 mg/dL的葡萄糖水溶液来演示所提出的传感器的液体传感性能。使用具有强大询问天线的网络分析仪记录和分析无线传感信号。结果，随着液体浓度的增加，共振频率以单调且线性的方式上升。该传感器对去离子水的归一化灵敏度为0.29%，高于已报道的基于微波法的液体传感器。无线微流控传感器为液体提供了一种紧凑、快速、实时的监测方法，在生物医学和环境领域具有广泛的应用前景。
A wireless microfluidic sensor based on microwave reflection principle for liquid detection was introduced in this work. The presented sensor comprised a slot antenna and substrate integrated waveguide (SIW) resonator that is integrated with the microchannel using low temperature co-fired ceramic (LTCC) technology. The electromagnetic simulation has been carried out for the sensor structure optimization. The ethanol aqueous solution of 0-50% mole fraction and glucose aqueous solution of 0-600 mg/dL were used for demonstrating the liquid sensing performance of the proposed sensor, respectively. The wireless sensing signal was recorded and analyzed using a network analyzer with a robust interrogation antenna. As the result, the resonant frequency rises in a monotonic and linear manner as the increase of liquid concentrations. The normalized sensitivity of the sensor is 0.29% for deionized water, which is higher than that of the reported liquid sensors based on microwave method. The wireless microfluidic sensor provides a compact, rapid, and real-time monitoring method for liquid, and has wide application prospects in biomedicine and environment area.