Crystallization and stability of rare earth iron garnet/Pt/gadolinium gallium garnet heterostructures on Si
Crystallization and stability of rare earth iron garnet/Pt/gadolinium gallium garnet heterostructures on Si
复制标题
Si上稀土铁石榴石/Pt/钆镓石榴石异质结构的结晶及稳定性
DOI：
10.1016/j.jmmm.2022.170043
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发表时间：
2022
影响因子：
2.7
通讯作者：
Ross, Caroline A.
中科院分区：
文献类型：
--
作者：
Gross, Miela J.;Bauer, Jackson J.;Ghosh, Supriya;Kundu, Subhajit;Hayashi, Kensuke;Rosenberg, Ethan R.;Andre Mkhoyan, K.;Ross, Caroline A.
稀土铁石榴石薄膜如镝铁石榴石在硅衬底上的结晶提供了一条将这些复杂氧化物集成到磁性器件中的途径。我们报道了50-75 nm厚的镝钇铁石榴石（YDyIG）薄膜的生长，在没有种子层的情况下沉积，然后通过750 °C快速热退火结晶，形成具有几微米直径的晶粒的多晶薄膜，其中包含辐射的低角度边界。Y：Dy比影响YDyIG的磁化强度和各向异性。随着石榴石膜厚度的减小，结晶变得更具挑战性。为了使更薄的稀土石榴石膜结晶，制备了由50 nm厚的钆镓石榴石（GGG）种子层、1.5 nm厚的Pt扩散阻挡层和10 nm厚的YDyIG膜组成的三层堆叠。YDyIG/Pt/GGG三层显示出Pt的团聚，导致由富含Dy和Fe的多晶石榴石膜组成的形态，并包含嵌入其表面附近的Pt纳米颗粒层。
The crystallization of rare earth iron garnet films such as dysprosium iron garnet on Si substrates provides a path for integration of these complex oxides into magnetic devices. We report the growth of 50–75 nm thick dysprosium yttrium iron garnet (YDyIG) films, deposited without a seed layer then crystallized by a 750 °C rapid thermal anneal, forming a polycrystalline film with grains of several µm diameter containing radiating low-angle boundaries. The Y:Dy ratio affects the magnetization and anisotropy of YDyIG. Crystallization becomes more challenging as the garnet film thickness decreases. To crystallize thinner rare earth garnet films, tri-layer stacks consisting of a 50 nm thick gadolinium gallium garnet (GGG) seed layer, a 1.5 nm thick Pt diffusion barrier, and a 10 nm thick YDyIG film were prepared. The YDyIG/Pt/GGG tri-layers showed agglomeration of the Pt leading to a morphology consisting of a polycrystalline garnet film enriched with Dy and Fe and containing a layer of Pt nanoparticles embedded near its surface.