Influence of surface preparation on CdZnTe nuclear radiation detectors
Influence of surface preparation on CdZnTe nuclear radiation detectors
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DOI：
10.1016/j.apsusc.2011.05.098
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发表时间：
2011-08
影响因子：
6.7
通讯作者：
Q. Zheng;F. Dierre;J. Crocco;V. Carcelén;H. Bensalah;J. Plaza;E. Dieguez
中科院分区：
文献类型：
--
作者：
Q. Zheng;F. Dierre;J. Crocco;V. Carcelén;H. Bensalah;J. Plaza;E. Dieguez
采用高分辨率x射线衍射（HRXRD）、原子力显微镜（AFM）、扫描电镜（SEM）等技术对经过机械研磨、抛光和化学蚀刻处理的CdZnTe （CZT）样品进行了表面形貌表征。结果表明，该刻蚀工艺产生的衍射峰强度最高，半峰全宽（FWHM）最佳。傅里叶变换红外光谱（FTIR）表明，精细抛光提高了CZT样品的红外透射率，而2%溴甲醇（BM）蚀刻降低了CZT样品的红外透射率。通过对表面形貌和粗糙度的比较，研究了不同蚀刻剂和浓度对表面粗糙度的影响。溴甲醇蚀刻比其他蚀刻剂具有更平坦的表面和更低的粗糙度。
High resolution X-ray diffraction (HRXRD), Atomic Force Microscope (AFM), Scanning Electron Microscope (SEM) techniques were used to characterize the surface of CdZnTe (CZT) samples treated by mechanical lapping, polishing and chemical etching processes. The results confirm that the etching process produces the highest intensity diffraction peak, and the best full-width-at-half-maximum (FWHM). Fourier Transform Infrared (FTIR) spectroscopy shows that fine polishing increases the infrared transmission of the CZT sample, while etching with 2% bromine methanol (BM) etching decreases the infrared transmission. Different etchants and concentrations were investigated by comparing the surface morphology and roughness. The bromine methanol etching has shown more flat surface with lower roughness than the other etchants.