FEM Modeling of Multilayer Piezo-magnetic Structure Based Surface Acoustic Wave Devices for Magnetic Sensor
FEM Modeling of Multilayer Piezo-magnetic Structure Based Surface Acoustic Wave Devices for Magnetic Sensor
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DOI：
10.1016/j.proeng.2014.11.276
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
M. Elhosni;O. Elmazria;A. Talbi;K. A. Aissa;L. Bouvot;F. Sarry
中科院分区：
文献类型：
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作者：
M. Elhosni;O. Elmazria;A. Talbi;K. A. Aissa;L. Bouvot;F. Sarry
本研究描述了精确且完全耦合的物理模型的实现，从而研究表面声波 (SAW) 器件对外部施加磁场的敏感性。该模型首先使用基于石英基板和镍叉指换能器 (IDT) 的 SAW 谐振器的实验公布数据进行了验证。然后对原始层状结构 Ni/ZnO/IDT/LiNbO3 和 Ni/Al2O3/IDT/LiNbO3 进行了研究和优化，以增强它们对磁场强度的敏感性。结果表明，Ni/Al2O3/IDT/LiNbO3 的灵敏度为 10 ppm/mT，比 ZnO 结构高 14 倍。
This study describes the implementation of accurate and fully coupled physics models leading to investigate Surface Acoustic Wave (SAW) devices sensitivity to an extern applied magnetic field. The model was firstly validated using experimental published data of SAW resonator based on Quartz substrate and Nickel Interdigital Transducers (IDT). Original layered structures, Ni/ZnO/IDT/LiNbO3and Ni/Al2O3/IDT/LiNbO3were then investigated and optimized to enhance their sensitivity to magnetic field intensity. Results show that Ni/Al2O3/IDT/LiNbO3exhibits a sensitivity of 10 ppm/mT, 14 times higher than the structure with ZnO one.