Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy
Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy
复制标题
DOI：
10.1063/1.1478775
复制
发表时间：
2002-06
影响因子：
4
通讯作者：
C. Flannery;T. Wittkowski;K. Jung;B. Hillebrands;M. Baklanov
中科院分区：
文献类型：
--
作者：
C. Flannery;T. Wittkowski;K. Jung;B. Hillebrands;M. Baklanov
具有纳米孔径的多孔薄膜是人们强烈兴趣的主题，主要是因为它们降低了介电常数k。由于缺乏有效的表征工具，以及薄膜力学性能随孔隙率增加而降低，严重阻碍了其发展和应用。我们表明，布里渊光散射和表面声波光谱允许一个测量密度，孔隙率和刚度性能的纳米多孔甲基倍半硅氧烷薄膜的低k值。在密度、孔隙率和杨氏模量的独立测量之间观察到良好的相关性，这表明所获得的结果是可靠的，并且揭示了使用其他技术难以或不可能获得的膜的性质。
Thin porous films with nanometer pore sizes are the subject of intense interest, primarily because of their reduced dielectric constant k. The lack of useful characterization tools and the reduction in film mechanical properties with increasing porosity have severely hindered their development and application. We show that both Brillouin light scattering and surface acoustic wave spectroscopy allow one to measure density, porosity and stiffness properties of nanoporous methylsilsesquioxane films of low-k value. Excellent correlations are observed among independent measurements of density, porosity and the Young’s modulus which show that the results obtained are reliable and reveal properties of the films which are difficult or impossible to obtain using other techniques.