Integration of Thin Film Strain Sensors Into Hard Drives for Active Feedback Vibration Suppression
Integration of Thin Film Strain Sensors Into Hard Drives for Active Feedback Vibration Suppression
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DOI：
10.1109/jsen.2012.2235177
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发表时间：
2013-05-01
影响因子：
4.3
通讯作者：
Horowitz, Roberto
中科院分区：
文献类型：
--
作者：
Felix, Sarah;Horowitz, Roberto
在本文中描述的工作演示了一种新的应用压电薄膜传感技术，将ZnO应变传感器到硬盘驱动器（HDD）和部署在一个高采样率的反馈控制器，以抑制振动的传感器。首先，薄膜ZnO传感器直接制造到HDD悬挂组件上，这是一个独特而具有挑战性的过程，因为基板是钢。传感器的几何形状被设计为对有助于偏离轨道方向的位移的振动模式具有选择性。智能悬架结构，然后封装到一个实验的HDD，沿着与一个小型化的调节电路和锆钛酸铅（PZT）致动元件。该传感器对所需模式表现出出色的灵敏度和选择性。最后，一个主动模式阻尼控制器上实现的仪表，PZT驱动的原型。采用薄膜传感器的反馈控制有效地抑制了悬架的高频摇摆模式。
The work described in this paper demonstrates a novel application of piezoelectric thin-film sensing technology by incorporating ZnO strain sensors into a hard disk drive (HDD) and deploying the sensors in a high-sample-rate feedback controller to suppress vibrations. First, thin-film ZnO sensors are fabricated directly onto a HDD suspension component, which was a unique and challenging process since the substrate is steel. The sensor geometry is designed to be selective to vibration modes that contribute to displacement in the off-track direction. The smart suspension structure is then packaged into an experimental HDD, along with a miniaturized conditioning circuit and lead zirconate titanate (PZT) actuation elements. The sensors demonstrate excellent sensitivity and selectivity to the desired modes. Finally, an active mode damping controller is implemented on the instrumented, PZT-actuated prototype. Feedback control using the thin film sensors effectively suppresses the high-frequency sway mode of the suspension.