Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy
Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy
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DOI：
10.1021/jacs.6b12709
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发表时间：
2017-02-15
影响因子：
15
通讯作者：
Van Duyne, Richard P.
中科院分区：
文献类型：
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作者：
Hackler, Ryan A.;McAnally, Michael O.;Van Duyne, Richard P.
利用操作表面增强拉曼光谱（Sers）技术成功地对原子层沉积（ALD）过程中在银表面上未知的二聚甲基氧化铝表面物种进行了氧化还原。在ALD过程中发现了与三甲基铝（TMA）和二甲基氯化铝（DMACl）表面物种的桥接部分相关的振动模式。适当的单体振动模式：发现作为Sers的选择性的结果是不存在的。密度泛函理论（DFT）计算也进行了定位和识别预期的振动模式。利用操作局域表面等离子体共振（LSPR）光谱仪来解释SER信号随ALD循环次数的变化。DMACI表面物种不能被测量后，多个ALD循环的结果，在Sers增强和移位LSPR的损失。这项工作突出了如何通过Sers和LSPR散射的操作光学光谱是有用的proObing的身份和结构的表面物种参与ALP，并最终，在这些载体材料上的催化反应。
Operando surface-enhanced Raman spectroscopy (SERS) was used to successfully ickntify hitherto unknown dimeric methylalumina surface species during atomic layer deposition (ALD) on a silver surface. Vibrational modes associated with the bridging moieties of both trimethylaluminum (TMA) and dimethylaluminum chloride (DMACl) surface species were found during ALD. The appropriate monomer vibrational modes were:found to be absent as a result of the selective nature of SERS. Density functional theory (DFT) calculations were also performed to locate and identify the expected vibrational modes. An operando localized surface plasmon resonance (LSPR) spectrometer was utilized to account for changes in SER signal as a function of the number of ALD cycles. DMACI surface species were unable to be measured after multiple ALD cycles as a result of a loss in SERS enhancement and shift in LSPR This work highlights how operando optical spectroscopy by SERS and LSPR scattering are useful for prObing the identity and structure of the surface species involved in ALP and,, ultimately, catalytic reactions on these support materials.