Leak detection, calibrations and reference flows: Practical example
Leak detection, calibrations and reference flows: Practical example
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DOI：
10.1016/j.vacuum.2007.04.019
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发表时间：
2007-08-28
期刊：
影响因子：
4
通讯作者：
Mari, D.
中科院分区：
文献类型：
--
作者：
Calcatelli, A.;Bergoglio, M.;Mari, D.
提出了一种基于示踪气体(一般为氦)质谱仪应用的最广泛的泄漏率小于10(-2)mbarL/S的检漏方法。描述了工业用质谱仪检漏仪(MSLD)的计量特性，因为它们是具有良好灵敏度和高测试速度的紧固测试的最佳选择。MSLD的校准是参照所谓的标准泄漏给出的已知气体流量进行的，标准泄漏可能产生从10(-8)到10(-2)mbar L/S的流量；这些泄漏是用一次气体流量计校准的，在I.N.RI.M.，这些一次气体流量计覆盖了从2×10(-8)到1×10(-3)mbar L/S的气体流量范围。作为例子，提供了一个部件在线测试装置，以及与MSLD单独的参考泄漏和将其插入整机时的校准结果。通过考虑影响不确定度评定的所有因素，可以得到小于20%的相对扩展不确定度。(C)2007爱思唯尔有限公司。保留所有权利。
The most diffused leak detection method for the leak rates lower than 10(-2) mbarL/s that is based on the application of mass spectrometry with tracer gas (generally helium) is considered. A description is given of the metrological characterization of the mass spectrometer leak detectors (MSLD) for industrial applications since they represent the best choice for tightening tests having good sensitivity and high testing speed. The calibration of MSLDs is performed with reference to known gas flow-rates as given by the so-called standard leaks which may generate flow from 10(-8) to 10(-2) mbar L/s; these leaks are calibrated against primary gas flow-meters which, at I.N.RI.M., cover the gas flow-rate ranges from 2 x 10(-8) to 1 x 10(-3) mbar L/s. As an example a device for on-line tests on components is presented together with the results of the calibrations against reference leaks of the MSLD alone and when it is inserted in a complete machine. By taking into account all the factors contributing to the uncertainty evaluation, a relative expanded uncertainty smaller than 20% may be reached. (c) 2007 Elsevier Ltd. All rights reserved.