Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices
Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices
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DOI：
10.1016/j.apsusc.2005.03.198
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发表时间：
2005-12-15
影响因子：
6.7
通讯作者：
Choi, JS
中科院分区：
文献类型：
--
作者：
Dhayal, M;Jeong, HG;Choi, JS
使用等离子体聚合工艺与光刻，湿法和干法刻蚀技术，我们已经制造了一个有机微流体器件（OXIDE）的硅/玻璃基板上。一种用于微流控器件（MFD）的非对称电极阵列，其中小电极（4 μ m宽）与大电极（20 μ m宽）在两侧分别隔开20 μ m和6 μ m的间隙。在这项研究中，我们发现等离子体聚合过程不仅对改变表面化学和物理性质很重要，而且由于聚合物材料的低Tg，在低温（类似于100摄氏度）下粘合这些微型器件方面也具有优势。在等离子体表面改性后，在150 μ m通道宽度的有机微流体装置中，流体速度测量显示出约450 μ m/s的最大值。(c)2005 Elsevier B. V.保留所有权利。
Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4 mu m wide) separated from the large electrode (20 mu m wide) by 20 mu m and 6 mu m gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (similar to 100 degrees C) due to low T-g of polymeric material. The fluidic velocity measurement shows a maximum of about 450 mu m/s in a 150 mu m channel width of organic micro-fluidic devices after plasma surface modification. (c) 2005 Elsevier B.V. All rights reserved.