Dramatic increase in the growth rate of GaN layers grown from Ga2O vapor by epitaxial growth on HVPE-GaN substrates with a well-prepared surface

Dramatic increase in the growth rate of GaN layers grown from Ga2O vapor by epitaxial growth on HVPE-GaN substrates with a well-prepared surface
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通过在表面准备充分的 HVPE-GaN 衬底上外延生长,由 Ga2O 蒸气生长的 GaN 层的生长速率显着提高

DOI:
10.7567/apex.7.035504
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发表时间:
2014
影响因子:
2.3
通讯作者:
Yuan Bu et al.
Yuan Bu et al.
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Y. Hashimoto;H. Furuya;M. Ueno;K. Yamane;N. Okada;K. Tadatomo;Yuan Bu et al.

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