Radiation effects on He+- and H+-implantation for ion slicing of rutile titanium dioxide thin film-猫眼课题宝

DOI：

10.1016/j.nimb.2022.10.013

发表时间：

2022-12

期刊：

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

影响因子：

通讯作者：

中科院分区：

其他

文献类型：

作者：

Yujie Ma;Senhua Lin;Y.C. Qiu;X. Zheng;Mingyoung Yu;Bingxi Xiang;F. Xu;Fei Lu;Cang-tao Zhou;S. Ruan

Radiation effects on He+- and H+-implantation for ion slicing of rutile titanium dioxide thin film