Femtosecond-laser-induced modifications on a 4H-SiC surface and their application to low-temperature diffusion at the Ni/SiC interface
Femtosecond-laser-induced modifications on a 4H-SiC surface and their application to low-temperature diffusion at the Ni/SiC interface
复制标题
飞秒激光诱导的 4H-SiC 表面改性及其在 Ni/SiC 界面低温扩散中的应用
DOI:
10.7567/jjap.57.116501
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发表时间:
2018
影响因子:
1.5
通讯作者:
Tanaka Yasuhiro
中科院分区:
文献类型:
--
作者:
Okada Tatsuya;Tomita Takuro;Ueki Tomoyuki;Hashimoto Takuya;Fuchikami Yuki;Katayama Hiroyuki;Hisazawa Hiromu;Tanaka Yasuhiro