Electret charging method based on X-ray photoionization for MEMS applications
Electret charging method based on X-ray photoionization for MEMS applications
复制标题
用于 MEMS 应用的基于 X 射线光电离的驻极体充电方法
DOI：
10.1109/ise.2011.6084958
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
Y. Suzuki
中科院分区：
文献类型：
--
作者：
K. Hagiwara;M. Goto;Y. Iguchi;T. Tajima;Y. Yasuno;H. Kodama;K. Kidokoro;Y. Suzuki
提出了一种基于软X射线辐照的驻极体充电方法。发现充电原理实际上是基于气体分子的光致电离，并且以CO2为工艺气体使充电时间最短。此外，充电的驻极体具有良好的热稳定性，表明本充电方法可以适用于各种MEMS驻极体换能器。
A novel electret charging method using soft X-ray irradiation is proposed for MEMS applications. It is found that the charging principle is actually based on the photoionization of gas molecules, and the charging time is minimized with Xe as the process gas. In addition, the charged electret has good thermal stability, showing that the present charging method can be applicable to various MEMS electret transducers.