Three-dimensional composition mapping of NiSi phase distribution and Pt diffusion via grain boundaries in Ni2Si
Three-dimensional composition mapping of NiSi phase distribution and Pt diffusion via grain boundaries in Ni2Si
复制标题
Ni2Si 中 NiSi 相分布和 Pt 通过晶界扩散的三维成分图
DOI：
10.1016/j.scriptamat.2009.12.044
复制
发表时间：
2010
影响因子：
6
通讯作者：
P. Clifton
中科院分区：
文献类型：
--
作者：
D. Mangelinck;K. Hoummada;A. Portavoce;C. Perrin;R. Daineche;M. Descoins;D. Larson;P. Clifton
通过原子探针断层扫描分析了与 Pt 合金化的 Ni 硅化物的形成。 300°C/1h 退火导致 NiSi 和 Ni2Si 相同时生长：Ni2Si 相是具有柱状晶粒的连续层，而 NiSi 相形成不连续层。显示了 Pt 通过 Ni2Si 晶界扩散短路的直接证据。晶粒和相间边界中 Pt 的存在可以解释 Ni(5% Pt)/Si 体系中 Ni 硅化物形成的变化。
The formation of Ni silicide alloyed with Pt has been analyzed by atom probe tomography. A 300°C/1h anneal results in simultaneous growth of the NiSi and Ni2Si phases: the Ni2Si phase is a continuous layer with columnar grains, while the NiSi phase forms a discontinuous layer. Direct evidence of Pt diffusion short-circuits via Ni2Si grain boundaries is shown. The presence of Pt in the grains and interphase boundaries may explain the change in the Ni silicide formation for the Ni(5% Pt)/Si system.