Miniaturized Integrated Gas Sensor Systems Combining Metal Oxide Gas Sensors and Pre-concentrators
Miniaturized Integrated Gas Sensor Systems Combining Metal Oxide Gas Sensors and Pre-concentrators
复制标题
结合金属氧化物气体传感器和预浓缩器的小型化集成气体传感器系统
DOI：
10.1016/j.proeng.2016.11.199
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
A. Schütze
中科院分区：
文献类型：
--
作者：
M. Leidinger;T. Sauerwald;C. Alepee;A. Schütze
一个集成的（室内）空气质量监测应用的微系统已经实现。通过将金属有机骨架材料气体预浓缩器和金属氧化物半导体气体传感器组合在单个SMD封装中，设计、集成并测试了用于检测ppb级挥发性有机化合物的装置，并以苯作为目标气体。该系统的特点是在有限元模拟有关其气体预浓缩的能力和行为。使用浓度在ppb范围内的苯进行测试测量。仿真和测量都表明了系统设计对任务的适用性。在低温下气体吸附后，在从预浓缩器的热解吸期间已经观察到显著增加的气体浓度。
An integrated microsystem for (indoor) air quality monitoring applications has been realized. By combining a gas pre-concentrator based on metal-organic framework materials and a metal oxide semiconductor gas sensor in a single SMD package, a device for detecting ppb levels of volatile organic compounds was designed, integrated and tested with benzene as a target gas. The system has been characterized in FEM simulations concerning its gas pre-concentration capabilities and behavior. Test measurements were performed using benzene at concentrations in the ppb range. Both the simulations and the measurements show the suitability of the system design for the task. Significantly increased gas concentrations have been observed during thermal desorption from the pre-concentrator after gas adsorption at a low temperature.